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Volumn 123, Issue 1-3, 1996, Pages 1-4
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Fabrication of an array illuminator using tandem Michelson interferometers
a
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Author keywords
[No Author keywords available]
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Indexed keywords
DIFFRACTION GRATINGS;
ELECTRON DEVICE MANUFACTURE;
HOLOGRAPHY;
IMAGING TECHNIQUES;
INTERFEROMETERS;
OPTICAL RECORDING;
BINARY GRATINGS;
DAMMANN GRATINGS;
DOUBLE WEDGE PLATE INTERFEROMETERS;
MICHELSON INTERFEROMETERS;
TALBOT ARRAY GENERATORS;
OPTICAL DEVICES;
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EID: 0029752601
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/0030-4018(95)00454-8 Document Type: Article |
Times cited : (7)
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References (26)
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