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Volumn 30, Issue 1-4, 1996, Pages 271-274
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Free volume effects in chemically amplified DUV positive resists
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Author keywords
[No Author keywords available]
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Indexed keywords
CHARACTERIZATION;
DIFFUSION;
DISSOLUTION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
GRAFT COPOLYMERS;
LITHOGRAPHY;
PHYSICAL PROPERTIES;
REFRACTIVE INDEX;
THICKNESS MEASUREMENT;
CHEMICALLY AMPLIFIED SYSTEMS;
DISSOLUTION MEASUREMENT;
FREE VOLUME EFFECTS;
PERKIN-ELMER DEVELOPMENT RATE MONITOR;
PHOTORESISTS;
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EID: 0029752160
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/0167-9317(95)00243-X Document Type: Article |
Times cited : (6)
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References (7)
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