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Volumn 30, Issue 1-4, 1996, Pages 271-274

Free volume effects in chemically amplified DUV positive resists

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; DIFFUSION; DISSOLUTION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAFT COPOLYMERS; LITHOGRAPHY; PHYSICAL PROPERTIES; REFRACTIVE INDEX; THICKNESS MEASUREMENT;

EID: 0029752160     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(95)00243-X     Document Type: Article
Times cited : (6)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.