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Volumn 397, Issue , 1996, Pages 323-328

Excimer laser applications in integrated circuit packaging

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONICS PACKAGING; EXCIMER LASERS; INTEGRATED CIRCUIT MANUFACTURE; INTERFACES (MATERIALS); LASER ABLATION; SURFACE ROUGHNESS; SURFACE STRUCTURE; SURFACE TREATMENT;

EID: 0029751709     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (6)

References (11)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.