Acetal-based three-component CARs: a versatile concept to tailor optical properties of resists

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2724, Issue , 1996, Pages 227-237

  Padmanaban, Munirathna ^a   Kinoshita, Yoshiaki ^a   Kawasaki, N ^a   Okazaki, Hiroshi ^a   Funato, S ^a   Pawlowski, Georg ^a  

^a SANOFI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT REFLECTION; LITHOGRAPHY; OPTICAL PROPERTIES; PHOTORESISTS; POLYMERS; SCANNING ELECTRON MICROSCOPY; ULTRAVIOLET RADIATION;

DEEP-ULTRAVIOLET RESISTS; DEPTH-OF-FOCUS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0029749711     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.241821     Document Type: Conference Paper

References (10)