Non-reactive excimer-based surface preparation and cleaning tool for broad-based industrial applications

Materials Research Society Symposium - Proceedings

Volumn 397, Issue , 1996, Pages 335-340

  Harvey, E C ^a   Fletcher, J ^a   Engelsberg, A C ^a  

^a Exitech Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CLEANING; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; ENVIRONMENTAL PROTECTION; EXCIMER LASERS; INDUSTRIAL APPLICATIONS; INERT GASES; LAMINAR FLOW; MOLECULAR STRUCTURE; PHOTONS; PROCESS CONTROL; SURFACE TREATMENT;

ENVIRONMENTALLY FRIENDLY; HIGH ENERGY PHOTONS; NON REACTIVE EXCIMER BASED SURFACE PREPARATION; SURFACE CONTAMINANTS; TOOL EMBODIMENT;

LASER APPLICATIONS;

EID: 0029748506     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)