3D simulation of thin film growth conditions at ion beam sputter deposition and comparison to experimental investigations

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2775, Issue , 1996, Pages 585-593

  Tilsch, Markus ^a   Scheuer, Volker ^a   Biersack, Jochen ^a   Tschudi, Theo T ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

3D SIMULATION; ION BEAM SPUTTER DEPOSITION;

COMPUTER SIMULATION; ION BEAMS; LIGHT ABSORPTION; SPUTTERING;

THIN FILMS;

EID: 0029748375     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)