Effect of substituent groups of phenol-derivative dissolution inhibitors on inhibition efficiency

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2724, Issue , 1996, Pages 208-215

  Kihara, Naoko ^a   Saito, Satoshi ^a   Naito, Takuya ^a   Ushirogouchi, Tohru ^a   Asakawa, Koji ^a   Nakase, Makoto ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOLUTION; EFFICIENCY; MOLECULES; PHENOLS; POLYMERS;

HYDROPHILIC PROPERTIES; PHENOL DERIVATIVES;

PHOTORESISTS;

EID: 0029747935     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.241818     Document Type: Conference Paper

References (8)