|
|
|
Volumn 411, Issue , 1996, Pages 185-190
|
|
Composition profiling of graded dielectric function materials by spectroscopic ellipsometry
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
DIELECTRIC PROPERTIES OF SOLIDS;
ELLIPSOMETRY;
NONDESTRUCTIVE EXAMINATION;
REFRACTIVE INDEX;
SECONDARY ION MASS SPECTROMETRY;
SEMICONDUCTING GLASS;
SPECTROSCOPIC ANALYSIS;
SURFACE ROUGHNESS;
SURFACE STRUCTURE;
COMPOSITION PROFILING;
DEPTH SENSITIVITY;
GRADED COMPOSITION LAYERS;
SPECTROSCOPIC ELLIPSOMETRY;
TRANSPARENT MATERIALS;
DIELECTRIC MATERIALS;
|
|
EID: 0029747562
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (2)
|
|
References (8)
|
