Supercritical fluid processing: opportunities for new resist materials and processes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2725, Issue , 1996, Pages 289-299

  Gallagher Wetmore, Paula M ^a   Ober, Christopher K ^a   Gabor, Allen H ^a   Allen, Robert D ^a  

^a Phasex Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CUTTING EDGE PROCESSING; SUPERCRITICAL FLUIDS;

CRYSTALLIZATION; FLUIDS; PERFORMANCE; POLYMERIZATION; PROCESS CONTROL; SOLVENTS; TECHNOLOGY;

PHOTORESISTS;

EID: 0029747371     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (39)