Melting evaporation and recrystallization of a-SiC:H films by excimer laser

Materials Research Society Symposium - Proceedings

Volumn 397, Issue , 1996, Pages 429-434

  Wickramanayaka, S ^a   Kitamura, K ^a   Nakanishi, Y ^a   Hatanaka, Y ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY; EVAPORATION; EXCIMER LASERS; LASER PULSES; MELTING; SILICON CARBIDE;

AMORPHOUS HYDROGENATED SILICON CARBIDE; LASER ANNEALING;

AMORPHOUS FILMS;

EID: 0029745853     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)