Fabrication of large-scale x-ray multilayers by DECR plasma sputtering

Vide: Science, Technique et Applications

Volumn , Issue , 1996, Pages 261-263

  Lingham, M ^a   Ziegler, E ^a   Luken, E ^a   Peffen, J Ch ^a  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARRIER CONCENTRATION; ELECTRON CYCLOTRON RESONANCE; ELLIPSOMETRY; FABRICATION; MICROWAVE GENERATION; PLASMAS; SPUTTERING; SYNCHROTRON RADIATION; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

DISTRIBUTED ELECTRON CYCLOTRON RESONANCE; ENERGY DISPERSIVE MASS SPECTROMETRY; IN SITU DISPERSIVE X RAY REFLECTOMETRY; LANGMUIR PROBE; LARGE SCALE X RAY MULTILAYERS; MULTILAYER DEPOSITION SYSTEM; MULTIPOLAR MAGNETIC PLASMA CONFINEMENT; PLASMA SPUTTERING; X RAY MEASUREMENTS;

MULTILAYERS;

EID: 0029737158     PISSN: 12660167     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)