Extended kalman filter based method for fast in-situ etch rate measurements

Materials Research Society Symposium - Proceedings

Volumn 406, Issue , 1996, Pages 87-93

  Vincent, T L ^a   Khargonekar, P P ^a   Terry, F L Jr ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ELLIPSOMETRY; ESTIMATION; FEEDBACK CONTROL; KALMAN FILTERING; MATHEMATICAL MODELS; MICROELECTRONIC PROCESSING; REFLECTION; REFLECTOMETERS; SURFACE ROUGHNESS; THIN FILMS;

ETCH RATE; NONLINEAR ESTIMATION THEORY; NONLINEAR FILTENING; REFLECTED LIGHT INTENSITY; WAFER;

ETCHING;

EID: 0029735452     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)