Kinetics of the C49 to C54 phase transformation in TiSi2 thin films on deep-sub-micron lines

Materials Research Society Symposium - Proceedings

Volumn 402, Issue , 1996, Pages 269-274

  Kittl, J A ^a   Prinslow, D A ^a   Apte, P P ^a   Pas, M F ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ANNEALING; GRAIN SIZE AND SHAPE; NUCLEATION; PHASE TRANSITIONS; REACTION KINETICS; THIN FILMS; TITANIUM COMPOUNDS;

AVRAMI EXPONENTS; JOHNSON-MEHL-AVRAMI KINETIC ANALYSIS; RAPID THERMAL ANNEALING;

SEMICONDUCTING FILMS;

EID: 0029735206     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)