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Volumn 406, Issue , 1996, Pages 183-188
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Near field scanning optical microscopy and spectroscopy of electronic materials and structures
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Author keywords
[No Author keywords available]
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Indexed keywords
CMOS INTEGRATED CIRCUITS;
CRYSTAL DEFECTS;
FLUORESCENCE;
MICROELECTRONICS;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTING INDIUM COMPOUNDS;
SEMICONDUCTING SILICON;
SILICA;
SPECTROSCOPIC ANALYSIS;
SURFACE STRUCTURE;
THIN FILMS;
FLUORESCENCE IMAGING;
INDIUM ALUMINUM ARSENIDE;
INDIUM GALLIUM ARSENIDE;
NEAR FIELD SCANNING OPTICAL MICROSCOPE;
SPATIAL RESOLUTION;
OPTICAL MICROSCOPY;
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EID: 0029734963
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (4)
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References (17)
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