Dynamics and trackability of stylus systems

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

Volumn 210, Issue 2, 1996, Pages 159-165

  Whitehouse, D J ^a   Wang, W L ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

Measuring instruments; Surface

Indexed keywords

DAMPING; DYNAMICS; INSTRUMENTS; MATHEMATICAL MODELS; OPTIMIZATION; SENSORS; SURFACES; TRANSDUCERS;

DISPLACEMENT; MEASURING INSTRUMENTS; PICK UP UNIT; STYLUS SYSTEMS; TRACKABILITY;

SURFACE MEASUREMENT;

EID: 0029734335     PISSN: 09544054     EISSN: None     Source Type: Journal    
DOI: 10.1243/PIME_PROC_1996_210_101_02     Document Type: Article

References (10)

1. Whitehouse, D. J. Dynamic aspects of scanning surface instruments and microscopes. Nanotechnology, 1990, 1, 93.
2. Morrison, E. The development of a prototype high speed stylus profilometer and its application to rapid 3D surface measurement. Proceedings of Fourth Biannual Joint Warwick/Tokyo Nanotechnology Symposium, 1994.
3. Xu, Y. and Smith, S. T. The determination of squeeze film damping in capacitance based cantilever force probes. Proceedings of Eighth Annual Meeting of the ASPE, 1993, p. 329.
4. Harris, C. M. and Crede, C. E. (Eds) Shick and vibration handbook, 3rd edition, 1988 (McGraw-Hill, New York).
5. Cross, W. A. Gas film lubrication, 1962, p. 318 (John Wiley, New York).
6. Howard, L. PhD thesis, Warwick University, 1993.
7. Whitehouse, D. J. Handbook of surface metrology, 1994 (Institute of Physics, Philadelphia and London).
8. Whitehouse, D. J. A revised philosophy of surface measuring systems. Proc. Instn Mech. Engrs, Part C, 1988, 202(C3), 169.
9. Newland, D. E. An introduction to random vibrations and spectral analysis, 2nd edition, 1984, p. 41 (Longman Group, London).
10. Liu, X., Chetwynd, D. G., Smith, S. T. and Wang, W. Improvement of the fidelity of surface measurement by active damping control. Measmt Sci. Technol., 1993, 4, 1330.