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Volumn 39, Issue 1, 1996, Pages 26-32

Particle formation of materials outgassed from silicone sealants by corona-discharge ionizers

Author keywords

Corona discharge ionizer; Fourier transformation infrared spectroscopy (FT IR) analysis; Low molecular weight poly cyclo dimethyl siloxane (LMCS); Outgassing; Particle formation; Silicone sealants

Indexed keywords

CLEAN ROOMS; DEGASSING; ELECTRIC CORONA; FOULING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MOISTURE; MOLECULAR WEIGHT; OXYGEN; PARTICLE SIZE ANALYSIS; POLYMERIZATION; SEALANTS; SILICONES;

EID: 0029734149     PISSN: 10522883     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (8)

References (14)
  • 4
    • 0026944802 scopus 로고
    • Correlating Organophosphorus Contamination on Wafer Surfaces with HEPA-Filter Installation
    • November
    • Mori, E.J., Dowdy, J.D., and Shive, L.W., "Correlating Organophosphorus Contamination on Wafer Surfaces with HEPA-Filter Installation," Microcontamination, pp. 35-56 (November, 1992).
    • (1992) Microcontamination , pp. 35-56
    • Mori, E.J.1    Dowdy, J.D.2    Shive, L.W.3
  • 9
    • 33748738848 scopus 로고
    • The Effect of Silicones on Electrical Contact Reliability
    • in Japanese
    • Yoshimura, T., and Itoh, S., "The Effect of Silicones on Electrical Contact Reliability," Proceedings of ITE, EMC 76-41, pp. 29-38 (1977). (in Japanese)
    • (1977) Proceedings of ITE, EMC 76-41 , pp. 29-38
    • Yoshimura, T.1    Itoh, S.2
  • 11
    • 0004265542 scopus 로고
    • John Wiley & Sons, New York
    • Smith, A.L., Analysis of Silicones, John Wiley & Sons, New York, p. 358 (1974)
    • (1974) Analysis of Silicones , pp. 358
    • Smith, A.L.1
  • 13
    • 33748719499 scopus 로고
    • Simultaneous Removal of Gaseous and Particulate Matters by Packed Beds
    • Emi, H., and Otani, Y., "Simultaneous Removal of Gaseous and Particulate Matters by Packed Beds," Smoking Research Foundation Annual Research Report, pp. 691-677 (1991).
    • (1991) Smoking Research Foundation Annual Research Report , pp. 691-1677
    • Emi, H.1    Otani, Y.2
  • 14
    • 33748734537 scopus 로고
    • Japanese Chemical Society, Kikan Kagaku Sosetsu (Ed.), Gakkai Publishing Center, in Japanese
    • Chemistry of Active Oxygen Species, Japanese Chemical Society, Kikan Kagaku Sosetsu (Ed.), Gakkai Publishing Center, p. 264 (1990). (in Japanese)
    • (1990) Chemistry of Active Oxygen Species , pp. 264


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.