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Volumn 401, Issue , 1996, Pages 387-392
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Computer simulation, design, and characterization of a nozzle for more effective delivery of oxidizing gases
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ALGORITHMS;
CHARACTERIZATION;
COMPUTER SIMULATION;
FILM GROWTH;
FLOW OF FLUIDS;
GEOMETRY;
MATHEMATICAL MODELS;
OXIDE SUPERCONDUCTORS;
OXIDES;
OZONE;
DYSPROSIUM COATED QUARTZ CRYSTAL MONITOR;
EFFECTIVE OXIDIZING GAS DELIVERY;
FLUX DISTRIBUTION;
GAS FLOW EQUATION;
MOLECULAR FLOW REGIME;
OXIDANT FLUX;
VACUUM DEPOSITION METHODS;
NOZZLES;
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EID: 0029733962
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (2)
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References (5)
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