Mass-spectrometric study of the pyrolysis reactions in the MOVPE of Ga2Se3 by in-situ gas sampling

Journal of Crystal Growth

Volumn 158, Issue 1-2, 1996, Pages 68-78

  Maung, N ^a   Fan, G H ^a   Ng, T L ^a   Williams, J O ^a   Wright, A C ^a  

^a GLYNDWR UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM COMPOUNDS; MASS SPECTROMETRY; METHANE; PYROLYSIS; SAMPLING; SELENIUM COMPOUNDS;

HYDROGEN SELENIDE; QUADRUPOLE MASS SPECTROMETER; TRIMETHYLGALLIUM;

METALLORGANIC VAPOR PHASE EPITAXY;

EID: 0029733235     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-0248(95)00401-7     Document Type: Article

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