MOCVD routes to thin films for superconducting applications. Precursor synthesis and film processing issues

Materials Research Society Symposium - Proceedings

Volumn 415, Issue , 1996, Pages 67-78

  Marks, T J ^a   Belot, J A ^a   Hinds, B J ^a   Chen, J ^a   Studebaker, D ^a   Lei, J ^a   Chang, R P H ^a   Schindler, J L ^a   Kannewurf, C R ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIELECTRIC FILMS; EPITAXIAL GROWTH; HIGH TEMPERATURE SUPERCONDUCTORS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDE SUPERCONDUCTORS; PEROVSKITE; PHASE TRANSITIONS; SUPERCONDUCTIVITY; SURFACE ROUGHNESS; THIN FILMS; X RAY DIFFRACTION;

DIELECTRIC THIN FILMS; FILM PROCESSING; METAL SUPERCONDUCTOR TRANSITION; PRECURSOR SYNTHESIS;

FILM GROWTH;

EID: 0029732977     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (26)