Development of novel nickel(β-diketonate)2. Ligand complexes as precursors for MOCVD of nickel and nickel oxide

Materials Research Society Symposium - Proceedings

Volumn 415, Issue , 1996, Pages 93-98

  Spee, Carel I M A ^a   Linden, Hans L ^a   Mackor, Adri ^a   Timmer, Klaas ^a   Meinema, Harry A ^a  

^a TNO   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORINE; HYDROLYSIS; MELTING; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NITROGEN; OXYGEN; POROUS MATERIALS; PRECIPITATION (CHEMICAL); VAPORIZATION; WATER;

NICKEL OXIDES; NICKEL TETRACARBONYL; PARTICLE PRECIPITATION; SOLID OXIDE FUEL CELLS;

NICKEL COMPOUNDS;

EID: 0029732902     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)