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Volumn 30, Issue 1-4, 1996, Pages 467-470
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A novel technique for the fabrication of sub-20nm metallic wires
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
IRRADIATION;
MICROELECTRONIC PROCESSING;
SILICA;
SURFACES;
METALLIC WIRES;
ULTRA FINE TRENCHES;
WIRE;
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EID: 0029732792
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/0167-9317(95)00289-8 Document Type: Article |
Times cited : (1)
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References (7)
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