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Volumn 30, Issue 1-4, 1996, Pages 467-470

A novel technique for the fabrication of sub-20nm metallic wires

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; IRRADIATION; MICROELECTRONIC PROCESSING; SILICA; SURFACES;

EID: 0029732792     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(95)00289-8     Document Type: Article
Times cited : (1)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.