New system for fast submicron optical direct writing

Microelectronic Engineering

Volumn 30, Issue 1-4, 1996, Pages 123-127

  Seltmann, R ^a   Doleschal, W ^a   Gehner, A ^a   Kuck H ^a   Melcher, R ^b   Paufler, J ^a   Zimmer, G ^a,b  

^a NONE   (Germany)

^b NONE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER AIDED DESIGN; EXCIMER LASERS; LASER APPLICATIONS; LIGHT MODULATORS; MICROELECTRONIC PROCESSING; PHOTORESISTS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

AUTOMATIC ALIGNMENT SYSTEM; AUTOMATIC WAFER HANDLER; FAST SUBMICRON OPTICAL DIRECT WRITING; PROGRAMMABLE PHASE MODULATING SPATIAL LIGHT MODULATOR;

PHOTOLITHOGRAPHY;

EID: 0029732549     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(95)00209-X     Document Type: Article

References (2)

1. H. Kück, M. Bollerott, W. Doleschal, A. Gehner, W. Grundke, D. Kunze, R. Melcher, J. Paufler, R. Seltmann, G. Zimmer, "New system for fast submicron laser direct writing", Proc. SPIE Vol.2440 Optical/Laser Microlithography VIII, 1995
2. H.Kück, W. Doleschal, A. Gehner, W. Grundke, R. Melcher, J. Paufler, R. Seltmann, G. Zimmer, "Deformable micromirror devices as phase modulating high resolution light valves", Sensors & Actuators, Proc. of Transducers '95 and Eurosensors IX, 1995