Microlithographic challenges for flat panel display production

Solid State Technology

Volumn 39, Issue 1, 1996, Pages 103-110

  Sumner, Roger C ^a,b,c,d  

^a MRS Technology Inc   (United States)

^b ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

^c MRS Technology Inc

^d GCA Tropel

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; ELECTRONIC EQUIPMENT MANUFACTURE; FIELD EMISSION MICROSCOPES; FOCUSING; IMAGE PROCESSING; INTEGRATED CIRCUIT LAYOUT; LIGHTING; LIQUID CRYSTAL DISPLAYS; OPTICAL DEVICES; OPTIMIZATION; PERFORMANCE; PRODUCTION;

ACTIVE MATRIX LIQUID CRYSTAL DISPLAYS; CRITICAL DIMENSIONS; FIELD EMISSION DISPLAYS; FLAT PANEL DISPLAYS; FOCUS SYSTEMS; HIGH RESOLUTION APPLICATIONS; ILLUMINATION SYSTEM; STAGE FLATNESS;

LITHOGRAPHY;

EID: 0029732230     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (10)

1. D. Menzley, 'International Display Report,' Stanford Resources, vol. 4, no. 7 (July 1995).
2. D. Lieberman, 'FEDs are Coming to Town,' OEM Magazine, p. 45 (April 1995).
3. G. Edmondson, 'The Grand Allance in Flat Paneits,' Business Week, p. 73 (Aug. 28, 1995).
4. D. Holtrook, J. McKbben, 'Microlthography for Large Area Flat Panel Display Substrates,' Solid State Technology (May 1992).
5. R. Sumner, D. Hobrook, 'Simulating the Srtching Performance of Flat Panel Display Steppers,' SPIE Laser/Optical Microlthography, p. 533 (1993).
6. D. Holbrook, J.C. Donaher, 'Overlay and Matching Strategy for Large Area Lithography,' SPIE (March 1991).
7. D. Cathey Jr., 'Field-Emission Displays,' Information Display. p. 16 (Oct. 1995).
8. K. Derbyshire, 'Beyond AMLCDs: Field emission displays?' Solid State Technology, p. 55, (Nov. 1994).
9. H. Gray, C. Sune, G. Jones, 'Silcon field-emitter arrays for cathodoluminescent flat panel displays,' Journal of the SID, 1/2, p. 143 (1993).
10. R. Sumner, 'Measurements of Fusion and Float Glass Plate Flatness Using a Fizeau Interferometer,' SID Intemational Symposium Digest of Technical papers, p. 442 (1995).