Application of DNQ-based microlithography to patterning bioactive molecules and cells

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2724, Issue , 1996, Pages 500-511

  Nicolau, Dan V ^a   Taguchi, Takahisa ^a   Taniguchi, Hiroshi ^a   Yoshikawa, Susumu ^a   Dusa, Mircea V ^a  

^a OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CELLS; FILMS; MOLECULES; ORGANIC COMPOUNDS; PHOTOCHEMISTRY; PROTEINS;

DIAZONAPHTHOQUINONE; MICROLITHOGRAPHY; SILYLATION;

PHOTORESISTS;

EID: 0029728261     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.241848     Document Type: Conference Paper

References (31)