Integrated force array: positioning drive applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2722, Issue , 1996, Pages 123-134

  Bobbio, Stephen M ^a   Goodwin Johansson, Scott ^a   DuBois, Thomas D ^a   Tranjan, Farid M ^a   Smith, Stephen W ^a   Fair, Richard B ^a   Ball, Christian ^a   Jacobson, James ^a   Bartlett, Charles ^a   Eleyan, Nadeem ^a   Makki, H ^a   Gupta, R ^a  

^a UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED FORCE ARRAY;

ACOUSTIC IMAGING; ACOUSTIC TRANSDUCERS; ELECTROSTATICS; FORCE MEASUREMENT; MEMBRANES; POSITION MEASUREMENT; THIN FILM DEVICES;

ACTUATORS;

EID: 0029727799     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)