Integrated mold/surface-micromachining process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2722, Issue , 1996, Pages 30-35

  Barron, Carole C ^a   Fleming, James G ^a   Montague, Stephen ^a   Sniegowski, Jeffry J ^a   Hetherington, Dale L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL SYSTEMS;

INTELLIGENT STRUCTURES; MOLDING; MONOLITHIC INTEGRATED CIRCUITS; OPTIMIZATION; SURFACE PHENOMENA;

MICROMACHINING;

EID: 0029727662     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)