Ion assisted nucleation in amorphous silicon: mechanism and theoretical description

Materials Research Society Symposium - Proceedings

Volumn 398, Issue , 1996, Pages 165-170

  Spinella, C ^a   Lombardo, S ^a   Priolo, F ^a   Campisano, S U ^a  

^a CNR IMETEM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; CRYSTAL DEFECTS; CRYSTALLIZATION; FREE ENERGY; GRAIN GROWTH; ION BOMBARDMENT; IRRADIATION; NUCLEATION; PHASE TRANSITIONS; REACTION KINETICS; THERMODYNAMIC STABILITY;

GROWTH VELOCITY; ION ASSISTED NUCLEATION; ION IRRADIATION; NUCLEATION RATE;

AMORPHOUS SILICON;

EID: 0029727445     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)