Deposition of gallium nitride films using ammonia and triethylgallium seeded helium beams

Materials Research Society Symposium - Proceedings

Volumn 395, Issue , 1996, Pages 331-336

  Sumakeris, J J ^a   Chilukuri, R K ^a   Davis, R F ^a   Lamb, H H ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; AMMONIA; AUGER ELECTRON SPECTROSCOPY; COMPOSITION; CRYSTAL MICROSTRUCTURE; DEPOSITION; HELIUM; NITRIDES; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES;

GALLIUM NITRIDE; HELIUM BEAMS; TRIETHYLGALLIUM;

THIN FILMS;

EID: 0029726182     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)