Processes to achieve vibrating beams for an angular rate measurement sensor

Canadian Conference on Electrical and Computer Engineering

Volumn 1, Issue , 1996, Pages 76-79

  Nikpour, B ^a   Landsberger, L M ^a   Haroun, B ^a   Kahrizi, M ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CMOS INTEGRATED CIRCUITS; DAMPING; ETCHING; FABRICATION; MASKS; NATURAL FREQUENCIES; PROCESS CONTROL; SEMICONDUCTING SILICON; VIBRATIONS (MECHANICAL);

ANGULAR RATE MEASUREMENT SENSOR; CORIOLIS ACCELERATION; LOW INTRINSIC DAMPING; VERTICAL SIDE WALLS; VIBRATING BEAM STRUCTURES;

SILICON SENSORS;

EID: 0029724497     PISSN: 08407789     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)