Si(001) homoepitaxial growth

Materials Research Society Symposium Proceedings

Volumn 404, Issue , 1996, Pages 107-115

  Tromp, R M ^a   Theis, W ^a   Bartelt, N C ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

KINETIC THEORY; NUCLEATION; PHASE EQUILIBRIA; SEMICONDUCTING SILICON; TEMPERATURE; THERMODYNAMICS;

HOMOEPITAXIAL GROWTH; KINETIC RESTRAINTS; THERMODYNAMIC EQUILIBRIUM;

EPITAXIAL GROWTH;

EID: 0029724174     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)