Deposition of TiN thin films by energetic condensation from a filtered cathodic arc process

International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV

Volumn 2, Issue , 1996, Pages 887-890

  Martin, P J ^a   Bendavid, A ^a   Kinder, T J ^a  

^a CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; FILTERED ARC DEPOSITION; FILTERED CATHODIC ARC SOURCES; RELATIVE ARRIVAL RATE;

CONDENSATION; ION BEAMS; ION BOMBARDMENT; MATHEMATICAL MODELS; NITROGEN; STRESSES; SUBSTRATES; THIN FILMS; TITANIUM NITRIDE; VAPOR DEPOSITION;

ION SOURCES;

EID: 0029723641     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)