Surface micromachined rotating micro-mirror normal to the substrate

LEOS Summer Topical Meeting

Volumn , Issue , 1996, Pages

  Reid, J R ^a   Bright, V M ^a   Comtois, J H ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DESIGN; FABRICATION; HINGES; LASERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PLATE METAL; SUBSTRATES; SURFACES;

MICRO MIRROR; MICROPROBES; OPTICAL MIRROR; POLYSILICON PLATE;

MIRRORS;

EID: 0029722490     PISSN: 10994742     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)