Ion damage propagation in dry-etched InP-based structures

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1996, Pages 107-110

  Hu, E L ^a   Yu, D G ^a   Chen, C H ^a   Keller, B P ^a   Holmes Jr , A L ^a   DenBaars, S P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING; IONS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR GROWTH; SUBSTRATES;

ION ASSISTED ETCHING; ION INDUCED DEFECTS;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0029721063     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)