Strain induced self organized growth of lateral periodic strained layer superlattices on off-oriented substrates by metalorganic vapour phase epitaxy

Solid-State Electronics

Volumn 40, Issue 1-8, 1996, Pages 819-823

  Marschner, T ^a   Tapfer, L ^b   Jin Phillipp, N Y ^c   Phillipp, F ^c   Lutgen, S ^d   Volk, M ^a   Stolz, W ^a   Gobel E O ^e  

^a PHILIPPS UNIVERSITY MARBURG   (Germany)

^b Centro Nazionale per la Ricerca e lo Sviluppo dei Materiali   (Italy)

^c MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^d MAX BORN INSTITUT   (Germany)

^e PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; METALLORGANIC VAPOR PHASE EPITAXY; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR GROWTH; SEMICONDUCTOR QUANTUM WIRES; STRAIN; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; X RAY CRYSTALLOGRAPHY;

MACROSTEPS; STRAIN INDUCED SELF ORGANIZED GROWTH; STRAINED LAYER SUPERLATTICES; SUBSTRATE OFF ORIENTATION; SURFACE STEPS; X RAY RECIPROCAL SPACE MAPPING;

SEMICONDUCTOR SUPERLATTICES;

EID: 0029719239     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/0038-1101(95)00369-X     Document Type: Article

References (14)

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