Sol-gel-derived lead and calcium lead titanate pyroelectric detectors on silicon MEMS structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2685, Issue , 1996, Pages 91-100

  Ho, James G ^a   Nelson, Phyllis R ^a   Lin, Felice H ^a   Chang, David T ^a   Kaiser, William J ^a   Stafsudd, Oscar M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCIUM COMPOUNDS; FABRICATION; HEAT TREATMENT; LEAD COMPOUNDS; MEMBRANES; OPTIMIZATION; PYROELECTRICITY; SEMICONDUCTING SILICON; SOL-GELS;

CALCIUM LEAD TITANATE; MICRO ELECTRICAL-MECHANICAL STRUCTURES (MEMS);

PHOTODETECTORS;

EID: 0029719186     PISSN: 0277786X     EISSN: None     Source Type: None    
DOI: 10.1117/12.237693     Document Type: Conference Paper

References (14)