Model of the gas-phase chemistry of boron nitride CVD from BCl3 and NH3

Materials Research Society Symposium - Proceedings

Volumn 410, Issue , 1996, Pages 459-464

  Allendorf, Mark D ^a   Melius, Carl F ^a   Osterheld, Thomas H ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; MATHEMATICAL MODELS; NITRIDES; REACTION KINETICS;

ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION; BORON NITRIDE; BORON TRICHLORIDE; GAS PHASE REACTIONS; PLUG FLOW CALCULATIONS; UNIMOLECULAR DECOMPOSITION;

BORON COMPOUNDS;

EID: 0029718154     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)