Optical network of silicon micromachined sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2687, Issue , 1996, Pages 78-88

  Wilson, Mark L ^a   Burns, David W ^a   Zook, J David ^a  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FIBER OPTIC SENSORS; RESONANT MICROBEAM STRUCTURES; SILICON MICROMACHINED SENSORS;

FIBER OPTICS; INTERFEROMETERS; MAGNETIC VARIABLES MEASUREMENT; MICROMACHINING; PRESSURE MEASUREMENT; Q FACTOR MEASUREMENT; SENSORS; SILICON; TEMPERATURE MEASUREMENT; THIN FILMS;

OPTICAL SYSTEMS;

EID: 0029717540     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)