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Volumn , Issue , 1996, Pages 413-417

Measurements of CF4 and C2F6 emissions from prebaked pots

Author keywords

[No Author keywords available]

Indexed keywords

ANODE EFFECTS; HEXAFLUOROETHANE; INFRARED PHOTOACOUSTIC SPECTROMETER; PERFLUORINATED CARBON COMPOUNDS; PREBAKED POTS; TETRAFLUOROMETHANE;

EID: 0029713827     PISSN: 10969586     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (19)

References (7)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.