Pd/Pt/Au and AuGe/Ni/Pt/Au ohmic contacts for AlSb/InAs HEMTs

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1996, Pages 354-357

  Boos, J B ^a   Kruppa, W ^a   Park, D ^a   Molnar, B ^a   Bass, R ^a   Goldenberg, M ^a   Bennett, B R ^a   Mittereder, J ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC RESISTANCE; GOLD; HIGH ELECTRON MOBILITY TRANSISTORS; METALLIZING; NICKEL; PALLADIUM; PLATINUM; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; TRANSCONDUCTANCE;

AUGER DEPTH PROFILING; CONTACT RESISTANCE; SOURCE DRAIN RESISTANCE;

OHMIC CONTACTS;

EID: 0029713339     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)