Electrical characterization of thin SiO2 films created by negative-point oxygen corona discharge processing

Canadian Conference on Electrical and Computer Engineering

Volumn 1, Issue , 1996, Pages 64-67

  Sayedi, S M ^a   Landsberger, L M ^a   Kahrizi, M ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; ELECTRIC CORONA; ELECTRIC DISCHARGES; ELECTRIC PROPERTIES; ELECTRIC VARIABLES MEASUREMENT; FILM GROWTH; LOW TEMPERATURE EFFECTS; MOS DEVICES; OXIDATION; OXIDES; RELIABILITY; SILICA;

NEGATIVE POINT OXYGEN CORONA DISCHARGE PROCESSING; THERMAL OXIDATION;

THIN FILMS;

EID: 0029713217     PISSN: 08407789     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)