In-situ observations of electromigration-induced void dynamics

Materials Research Society Symposium Proceedings

Volumn 404, Issue , 1996, Pages 163-169

  Frankovic, Richard ^a   Bernstein, Gary H ^a  

^a UNIVERSITY OF NOTRE DAME   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMICS; ELECTROMIGRATION; ELECTRON BEAM LITHOGRAPHY; FAILURE (MECHANICAL); INTEGRATED CIRCUITS; NUCLEATION; PERFORMANCE; SCANNING ELECTRON MICROSCOPY;

INTEGRATED CIRCUIT METAL INTERCONNECTIONS; VOIDS;

CRYSTAL DEFECTS;

EID: 0029712533     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)