Real-time monitoring of P-based semiconductor growth by linear-optical spectroscopy

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1996, Pages 590-593

  Knorr, K ^a   Rumberg, A ^a   Zorn, M ^a   Meyne, C ^a   Trepk, T ^a   Zettler, J T ^a   Richter, W ^a   Kurpas, P ^a   Weyers, M ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; DESORPTION; ELLIPSOMETRY; METALLORGANIC VAPOR PHASE EPITAXY; OXIDATION; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH; SPECTROSCOPIC ANALYSIS;

DEOXIDATION; LINEAR OPTICAL SPECTROSCOPY; REFLECTANCE ANISOTROPY SPECTROSCOPY; SPECTROSCOPIC ELLIPSOMETRY;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0029712167     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)