Design of a compact negative metal ion beam source for surface studies

Materials Research Society Symposium - Proceedings

Volumn 396, Issue , 1996, Pages 623-628

  Park, Y ^a   Ko, Y W ^a   Sohn, M H ^a   Kim, S I ^a  

^a STEVENS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CESIUM; DEPOSITION; ION BEAMS; ION BOMBARDMENT; PRESSURE; SURFACES; VACUUM APPLICATIONS;

CHAMBER PRESSURE; DIRECT LOW ENERGY METAL ION BEAM DEPOSITION; ION BEAM ENERGY; ION CURRENTS; NEGATIVE METAL ION BEAM SOURCE; SOLID STATE ION BEAM TECHNOLOGY; ULTRA HIGH VACUUM;

ION SOURCES;

EID: 0029710419     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)