Short-time hydrogen passivation of poly-Si CMOS thin film transistors by high dose rate plasma ion implantation

Materials Research Society Symposium - Proceedings

Volumn 396, Issue , 1996, Pages 515-520

  Qin, Shu ^a   Bernstein, James D ^a   Zhou, Yuanzhong ^a   Liu, Wei ^a   Chan, Chung ^a   King, Tsu Jae ^a  

^a NORTHEASTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGENATION; ION IMPLANTATION; MODULATORS; PASSIVATION; PLASMA SOURCES; PLASMAS; POLYCRYSTALLINE MATERIALS; PULSE GENERATORS; SILICA; SILICON;

MICROWAVE MULTIPOLAR BUCKET PLASMA REACTORS; PLASMA ION IMPLANTATION; POLYCRYSTALLINE SILICON;

THIN FILM TRANSISTORS;

EID: 0029710415     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)