Bonded SOI technologies for high voltage applications

IEEE International Symposium on Power Semiconductor Devices & ICs (ISPSD)

Volumn , Issue , 1996, Pages 41-49

  Abe, Takao ^a   Katayama, Masatake ^a  

^a SHIN ETSU CHEMICAL CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

POWER ELECTRONICS; SEMICONDUCTING SILICON; ULTRATHIN FILMS;

SEPARATION BY IMPLANTED OXYGEN (SIMOX);

SILICON ON INSULATOR TECHNOLOGY;

EID: 0029709963     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (32)