Kelvin test structure for measuring contact resistance of shallow junctions

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1996, Pages 241-245

  Nanver, L K ^a   Goudena, E J G ^a   Slabbekoorn, J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE MEASUREMENT; EXCIMER LASERS; INTEGRATED CIRCUITS; ION IMPLANTATION; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING; SEMICONDUCTOR JUNCTIONS;

CROSS BRIDGE KELVIN RESISTOR; KELVIN CONTACT RESISTANCE TEST STRUCTURE; PARASITIC RESISTANCES;

RESISTORS;

EID: 0029709548     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)