Cavity nucleation and evolution in He-implanted Si and GaAs

Materials Research Society Symposium - Proceedings

Volumn 396, Issue , 1996, Pages 801-806

  Follstaedt, D M ^a   Myers, S M ^a   Petersen, G A ^a   Barbour, J C ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; DISLOCATIONS (CRYSTALS); HELIUM; ION IMPLANTATION; NUCLEATION; SEMICONDUCTING FILMS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON;

CAVITY LAYERS; EXFOLIATION; HELIUM ION IMPLANTATION; PLANAR DEFECTS;

CAVITY RESONATORS;

EID: 0029709234     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)