Observation of vacancy clustering in Si crystals during in situ electron irradiation in a high voltage electron microscope

Materials Research Society Symposium Proceedings

Volumn 404, Issue , 1996, Pages 189-194

  Fedina, L ^a   Van Landuyt, J ^a   Vanhellemont, J ^a   Aseev, A ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; ELECTRON BEAMS; ELECTRON MICROSCOPY; IRRADIATION; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SILICA; SILICON NITRIDE;

ELECTRON IRRADIATION; FRANK DISLOCATION LOOPS; STACKING FAULT TETRAHEDRA; VACANCY CLUSTERS;

CRYSTALS;

EID: 0029709209     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)