Realizing micro-optoelectromechanical devices through a commercial surface-micromachining process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2687, Issue , 1996, Pages 34-46

  Bright, Victor M ^a   Comtois, John H ^a   Sene, D E ^a   Reid, J R ^a   Gustafson, Steven C ^a   Watson, Edward A ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER DIODES; MICRO-OPTOELECTROMECHANICAL DEVICES; POLYCRYSTALLINE SILICON; SURFACE MICROMACHINING;

ARRAYS; CRYSTALLINE MATERIALS; ELECTROMECHANICAL DEVICES; HOLOGRAPHY; INTERFEROMETERS; MIRRORS; OPTICAL DATA STORAGE; OPTICAL DEVICES; SILICON;

MICROMACHINING;

EID: 0029708192     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)