New PI-silica hybrids via sol-gel process for thin film dielectric materials

Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals

Volumn 280, Issue , 1996, Pages 277-282

  Kang, Su Jin ^a   Kim, Dong Jin ^a   Lee, Ji Hoon ^a   Choi, Sam Kwon ^a   Kim, Hwan Kyu ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Hannam University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; DIELECTRIC MATERIALS; HYDROLYSIS; MICROELECTRONIC PROCESSING; PERMITTIVITY; POLYCONDENSATION; POLYIMIDES; SILICA; SOL-GELS; STRUCTURE (COMPOSITION); THIN FILMS; X RAY DIFFRACTION;

DIMETHYLFORMANIDE; POLYIMIDE PRECURSOR; POLYIMIDE SILICA HYBRID MATERIALS; TETRAETHOXYSILANE;

COMPOSITE MATERIALS;

EID: 0029708099     PISSN: 1058725X     EISSN: None     Source Type: Journal    
DOI: 10.1080/10587259608040343     Document Type: Article

References (9)

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